Semiconductor Equipment & Decontamination

BELFOR pioneered successful decontamination and recovery processes for technical equipment of all types, following contamination events caused by fires, floods, water damage, chemical spills, and more.

This expertise makes BELFOR one of the leading decontamination service providers in the semiconductor industry.

BELFOR can provide parts decontamination, single tool decontamination, and full wafer fab decommissioning, including assessment and/or decontamination of all equipment and tools.

• BELFOR has specific experience in the decontamination of both “front-end” and “back-end” semiconductor equipment.
• Using different techniques, such as gas detection and surface wipe sample analysis, we can pinpoint the source of contamination and effectively remove hazardous contaminants from equipment and tools.
• We can assess and begin decontamination procedures of the semiconductor equipment prior to relocation.
• We can provide documentation that declares the status of the equipment to freight forwarders, transportation regulatory authorities, and to the party receiving the equipment.

Typically, our range of decontamination services includes:

• Equipment contamination assessment
• De-installation of all tools and equipment
• Equipment decontamination
• Rigging of equipment from within the cleanroom
• Rigging, crating and transportation of equipment
• Field equipment cleaning and decontamination
• Full facility decontamination to restore 4-wall configuration or partial decontamination as requested.

We have successfully completed numerous semiconductor equipment decontamination projects and full decontamination of major semiconductor fabrication plants worldwide.

Some of our specific equipment experience includes, but is not limited to:

• Chemical Mechanical Planar (CMP) systems
• Chemical Vapor Deposition (CVD, Inc., PECVD & SACVD) systems
• Furnaces (Nitride, Poly, Oxide)
• Gas Control Panels
• Metrology Systems
• Physical Vapor Deposition (PVD) systems
• Spin/Rinse Dryers Steppers
• Wafer Packaging systems
• Common utilities and support systems

Facility decontamination and decommissioning services are also available through the BELFOR Environmental division.

• BELFOR Environmental provides several services specific to the semiconductor industry, including facility decontamination, process systems removal, complete demolition, in-plant maintenance services and final clearance reporting for real estate transactions.
• BELFOR Environmental has performed fab decontamination, decommissioning and demolition projects for prominent and large fabs on the East Coast, Texas, West Coast and Asia.
• We provide characterization of the facility and any repair or remediation needed to bring the property to marketable condition.

Our services include:

• Parts Harvesting
• Reclamation and Recycling
• Consignment Services
• Destruction Services

With knowledgeable teams in the United States, Asia and Europe, BELFOR can provide semiconductor decontamination services globally.

• In the United States, decontamination services can be performed on-site, as well as at one of BELFOR’s specially designed facilities in Fort Worth, Texas or Austin, Texas.
• We are also skilled in safe transportation procedures to return your equipment in its pre-disaster condition as soon as possible.
• Our team of experts perform all semiconductor decontamination services with the SEMI S12 – Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination in mind. BELFOR was instrumental in serving as co-author for the latest version of this guideline.