Read More
BELFOR carry out a wide range of decontamination and *recovery work for hazardous chemicals/gasses/ contaminated semiconductor tool/equipment/ancillary equipment that is to be relocated, storage (long/short term), spills/leaks, or contaminations.
Some of our specific tool/equipment experiences include:
- Chemical Mechanical Planar (CMP) Systems
- Chemical Vapor Deposition (CVD, incl. PECVD & SACVD) Systems
- Furnaces (Nitride, Poly, Oxide)
- Gas Control Panels
- Ion Implanters
- Physical Vapor Deposition (PVD) Systems
- Spin/Rinse Dryers
- Steppers
- Valve Manifold Box (VMB)
- Common utilities and support systems
BELFOR Technical Support Center can develop specific decontamination solutions to a wide variety of unique contamination situations in any industry.
* The definition of recovery here refers to the safety aspect/condition of the equipment. It is not a recovery of functional operation or design parameters.
The right Expertise for every Claim
BELFOR understands the challenges you face.
A dedicated team that provides you with personalised and optimum support at all times.