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BELFOR has a workshop facility in Taiwan that carry out a wide range of decontamination solution for parts contaminated through exposure to process chemicals/speciality gases/slurry/waste residue and returned to the client for repair/refurbishment/disposal or manufacturing reuse.
Some of our specific experiences include parts from the following tools/equipment :
- Chemical Mechanical Planar (CMP) Systems
- Chemical Vapor Deposition (CVD, incl. PECVD & SACVD) Systems
- Furnaces (Nitride, Poly, Oxide)
- Ion Implanters
- Physical Vapor Deposition (PVD) Systems
- Steppers
- Valve Manifold Box (VMB)
- Common utilities and support systems
- Others (please check with BELFOR Taiwan).
BELFOR Technical Support Center can develop specific decontamination solutions to a wide variety of unique contamination situations to any industries.
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